In order to isolate the air from the atmosphere, the vacuum equipment should have reliable vacuum seals at the connections of its various parts and components, the introduction of power and signal, the observation window of the rotation axis, the gate, the end of the heat sink and the cover of the environment simulation. The sealing performance of vacuum equipment is one of the important indicators of vacuum equipment, and it is required to limit the air leakage rate within the allowable range through various sealing methods. In order to ensure the requirements of the vacuum equipment, it is necessary to design various sealing structures correctly. Choosing appropriate sealing materials is one of the keys to ensuring quality.
The vacuum seal of vacuum equipment can usually be divided into two types: semi-permanent seal (or detachable seal) and permanent seal (non-detachable seal), and semi-permanent seal is divided into static seal and dynamic seal.
Semi-permanent seal (removable seal) means that the parts and components used in the vacuum system can be connected by rubber pipes, bellows, quick-release flanges, rubber rings (or gaskets), plastics, soft metals, etc. for pumping, which are all semi-permanent Sexually sealed.
On the contrary, the used parts and components are a whole and are not detachable and belong to a permanent seal.
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