Vacuum electrode introduction

    There are many processes in a vacuum chamber that require the introduction of electrodes into the chamber. Usually made into electrode lead-in parts (including electrode structure, lead-in wires), and connected to the vacuum chamber by means of a vacuum static seal. Between these wires and wires, and between wires and the walls of the vacuum chamber, electrical insulation, vacuum sealing and certain current load should be satisfied.

    The selection of electrode lead-in wires and electrode sealing materials depends on the working voltage, current, frequency, temperature, etc. Generally, the electrode lead-in wires are divided into permanent sealing electrode lead-in wires and detachable sealing electrode lead-in wires. The former is used in high temperature bakeable and various vacuum measuring gauges, and the latter is used in general high vacuum pumping systems.

    Permanently sealed electrode lead-in adopts glass-to-metal sealing or ceramic-to-metal sealing. According to the shape, it is divided into rod sealing, core column sealing, ribbon sealing, disc sealing and cup sealing.

    High-current or high-voltage lead-in wires usually combine the two types of sealing. The lead-in wire and the glass (or ceramic) are permanently sealed, and the sealed electrode lead and the electric chamber (pipe) are sealed with a detachable (or semi-detachable wax) seal.

(huiputech)